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生物通
7 个月
磁控溅射MoOx薄膜热致导电增强机制:氧空位与晶相转变的协同效应
本文通过磁控溅射(RF magnetron sputtering)结合MoO2.8靶材,系统研究了基底加热与退火处理对MoOx薄膜导电性能的调控机制。研究发现,热诱导氧空位浓度升高和单斜相MoO2晶相形成是电阻率降至8.49×10-4 Ω·cm的关键,为透明电子器件(TFTs)和太阳能电池(PCE)的电极 ...
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