The study of micro- and nanoscale surface metrology is becoming commonplace in industrial and research environments, as structures and surface features become smaller and smaller. In particular, ...

Vibrations can produce a number of significant challenges when conducting phase-shifting laser interferometer measurements. Today’s advanced interferometers have ...

Common to optical metrology in many modern systems, the Fizeau design uses a fixed, on-axis coherent point source to illuminate the interferometric cavity. For the most part, it works very well. While ...

This article outlines how to measure, control, and stabilize the relative distance of two interferometer paths to sub-wavelength precision over numerous wavelengths, using the Zurich Instruments MFLI ...